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日本YAMATO等離子清洗機(jī)V1000/V1000X/V1000XS

日本YAMATO等離子清洗機(jī)V1000/V1000X/V1000XS 產(chǎn)品詳情

日本YAMATO等離子清洗機(jī)V1000/V1000X/V1000XS是大型等離子清洗機(jī)

Plasma Cleaner

V1000/V1000X/V1000XS

Model
V1000	V1000X	V1000XS
Plasma Mode
RIE and DP
RIE: Reactive Ion Etching DP : Direct Plasma
High-frequency Output
1000W	1000W/1500W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
280×280	300×300	400×375

ControlDisplay

Programmable control
(touch panel)

Chamber

Purpose : RemovalofOrganic films, Surface cleaning, Surface reforming, Surfaceetchingetc.

Specifications

Model	V-1000	V-1000X	V-1000XS
PlasmaMode	RIEａnd DP
MainUnit
Electrodestructure	Parallel flat stage plate
Stagesize	280mmW×280mmD	300mmW×300mmD(Double stage)	400mmW×375mmD
Chambersize	400mmW×400mmD×380mmH	400mmW×400mmD×380mmH	600mmW×554mmD×440mmH
Vacuumgauge	Capacitance manometer
Reactiongas system	Twosystems
Controller	Programmable controller
Display	Programmable terminal (touch panel)
Radio-FrequencyPower Supply
Input	AC200/220/380V,Three phase,
Radio-frequency output power	1,000W	1,000& 1,500W
Referenceoscillator	Quartz oscillator
Oscillating frequency	13.56MHz
Matchingadjustment	Automatic tuning
Discharge System(Vacuum Pump)
Displacement	670 &1,000liters/min.	670 &1,500liters/min.	1,000 &1,500liters/min.
Inletconfiguration	NW40with a flexible stainless steel hose (1 meter long)
Outletconfiguration	NW40
GasSystems
Purgegas	Nitrogen (N2) and a regulator (3 kgf/cm2) withamanometer
Drivinggas	Airornitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) withamanometer
Reactiongas G1	Oxygen (O2) and a mass flow controller (1000 secm)
Reactiongas G2	Argon(Ar) and a mass flow controller (100 secm)
SafetyMechanisms
SystemProtections	Oscillator protection circuit Front-door interlockswitch(interlocked with the startup) Safety switches (interlock switch on the side panels) Vacuumleaktest function Air-purge end buzzer Alarm buzzer *Emergency stoppush-buttonswitch
Actions againstatrouble of the vacuum pump	Theplasma scrubber takes the counteractions listed below andshow anAlarm message on its display when something wrong happens onthevacuum pump. The main valve closes The gas feed valve closes Theisolationvalve closes The oscillator stops outputting Treatment process issuspendedThe Alarm buzzer starts sounding * The alarm indicator lamp lights up to notify the trouble ofthevacuum pump *The treatment process timer stops
REQUIREDUTILITIES
PowerSupply
Main unitwith vacuum pump	Threephases, AC220V, 30 A, 60Hz (with an accessory power cableof 3meters long, and exposed crimp-style terminals of 8millimeterslong)
Gases
Drivinggas	Airornitrogen (N2) (Feed pressure: 5～7 kgf/cm2)
Purgegas	Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)
Reactiongas G1	Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
Reactiongas G2	Argon(Ar) (Feed pressure: 1.5 kgf/cm2)
Connectionport	1/4"swagelok joint bulkhead union (SS-400-61)
	Note:Pressure regulators, filters and other protective devicesshall beprepared by others.
Connection Diameter of the Discharge Duct (ａnd inletPort)
Vacuumpump's inlet port	NW4O(with a flexible stainless steel hose of 1 meterlong)
Vacuumpump's outlet port	NW4O
Mainunit's ozone outlet port	163mmdiameter
Oscillator's ventilation port	163mmdiameter
	Note:Every port has a connector designed for a flexible hose.Connect aduct to these inlet and outletports.

關(guān)鍵詞：清洗機(jī)

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