Verifire™ XL 激光干涉儀是一個獨立的工作站，設(shè)計用于直徑達12英寸（300毫米）的大型平面的簡單可靠計量。示例包括前表面反射器，窗口和半導(dǎo)體晶片或晶片卡盤。

這種集成的系統(tǒng)易于使用，具有重型傾斜/傾斜平臺，可提供可重復(fù)的零件放置，無需定制夾具。

Verifire™ XL 激光干涉儀外形緊湊，內(nèi)置隔振，需要最小的生產(chǎn)空間。

振動穩(wěn)健

Verifire XL系統(tǒng)包括ZYGO的QPSI™采集技術(shù)，可在存在振動的情況下進行可靠的高精度測量。QPSI可實現(xiàn)真正的軸上表面形狀測量，而不會降低典型的生產(chǎn)振動。

準確的計量

Verifire XL系統(tǒng)中的高性能變速箱平面設(shè)計用于對重力下垂的最小靈敏度，并包括一個全區(qū)域校準文件，以實現(xiàn)系統(tǒng)精度。
Mx™軟件

ZYGO專有的Mx™測量和分析軟件提供廣泛的操作功能和數(shù)據(jù)可視化工具，可在易于使用的界面中實現(xiàn)的測量功能。

MX軟件現(xiàn)在包括SmartAveraging®技術(shù)，可幫助獲得在最短的時間量測量，以及內(nèi)置的SPC提供了*的能力進行生產(chǎn)的情況。

主要特點：

•12“（300mm）光圈

•緊湊的占地面積，獨立系統(tǒng)

•易于零件裝載和對齊

•簡單的設(shè)置和簡化的操作

•內(nèi)置預(yù)對準傳輸平面

•集成的隔振和QPSI™技術(shù)，可在生產(chǎn)環(huán)境中進行可靠的測量



 

Large-Aperture Downward-Looking Interferometer Workstation

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.

Vibration Robust

The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Accurate Metrology

The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.

Mx™ Software

ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging®technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.