概要
高穩(wěn)定性的質(zhì)量流量計(jì)-氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測(cè),采用壓力鈍感模式
特征
- 采用不同壓力感測(cè)即鈍感模式
- 縮小氣體柜的體積(不再需要壓力傳感器,調(diào)壓閥和過濾器)
- 流量控制量程范圍廠
- 精度高
- 提高產(chǎn)能-可以提供標(biāo)準(zhǔn)流量給半導(dǎo)體制程。
規(guī)格
| D212 | |||
|---|---|---|---|---|
Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | ||
Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | ||
Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) |
Accuracy under Digital mode | ±1% S.P. | ±1% S.P. | ±1% S.P. | ±1% S.P. |
Control Range under Digital mode (% F.S.) | 2.5% ~ 99% | 30 ~ 99% | 0.5 ~ 99% | 2 ~ 99% |
Recommended Re-Zero Term | once/ year | |||
Valve Type (PIEZO) | Normally Close | |||
Linearity | ±0.5% F.S. | |||
Repeatability | ±0.3% S.P. ( 10~99%) | |||
Response Time | 800 msec. | |||
Proof Pressure | 500kPa(g) | |||
Burst Pressure | 1MPa(g) | |||
Leak Integrity | <5×10-12 Pa·m3/s (He) | |||
Wetted Materials | SUS-316L , INCONEL | |||
Operating Temperature | 15 ~ 45°C | |||
Flow Rate Setting Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
Flow Rate Output Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
Power Requirement | ± 15V ± 5%, 150 mA | |||
Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | |||
Installation Orientation | Attitude Insensitive | |||
| D214 | ||||
|---|---|---|---|---|---|
Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | |||
Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | |||
Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) | |
Accuracy under Digital mode | ±1% S.P. (35 ~ 99%) | ±1% S.P. ( 50 ~ 99%) | ±1% S.P. ( 5 ~ 99%) | ±1% S.P. ( 10 ~ 99%) | |
Control Range under Digital mode | 2.5% ~ 99% F.S. | 30 ~ 99% F.S. | 0.5 ~ 99% F.S. | 2 ~ 99% F.S. | |
Recommended Re-Zero Term | once/ year | ||||
Valve Type (PIEZO) | Normally Close | ||||
Linearity | ±0.5% F.S. | ||||
Repeatability | ±0.3% S.P. ( 10~99%) | ||||
Response Time | 800 msec. | ||||
Proof Pressure | 500kPa(g) | ||||
Burst Pressure | 1MPa(g) | ||||
Leak Integrity | <5×10 -12 Pa·m 3 /s (He) | ||||
Wetted Materials | SUS-316L , INCONEL | ||||
Operating Temperature | 15 ~ 45°C | ||||
Flow Rate Setting Signal | Device Net | ||||
Flow Rate Output Signal | Device Net | ||||
Power Requirement | 11~25VDC 4VA | ||||
Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | ||||
Installation Orientation | Attitude Insensitive | ||||
NOTE |
| ||||
There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it. | |||||

































龙山县|
松溪县|
宁国市|
灵川县|
阿瓦提县|
宝应县|
佛冈县|
呼图壁县|
黄大仙区|
廊坊市|
肥西县|
武鸣县|
乌恰县|
武强县|
泽普县|
福州市|
赞皇县|
五常市|
江门市|
乳山市|
财经|
公主岭市|
静乐县|
大姚县|
资源县|
寿光市|
唐海县|
九寨沟县|
社旗县|
宝应县|
腾冲县|
霍州市|
皮山县|
嘉善县|
合川市|
卢湾区|
荔浦县|
酒泉市|
当阳市|
南召县|
金堂县|