setra西特C25高純氣體壓力變送器半導(dǎo)體用
setra
SetraC25系列超高純壓力變送器專門設(shè)計(jì)用于半導(dǎo)體工藝過程中的超高純氣體輸送系統(tǒng)以及要求超潔凈工作、高吞吐量和超高長期穩(wěn)定性的控制應(yīng)用。
C25系列采用可旋轉(zhuǎn)的外罩結(jié)構(gòu)，用戶可方便地調(diào)節(jié)用于零點(diǎn)和量程微調(diào)的多圈電位計(jì)。標(biāo)準(zhǔn)的外螺紋/內(nèi)螺紋端面密封壓力接口可滿足半導(dǎo)體行業(yè)的要求。此外，該系列產(chǎn)品還可選多種其他接口類型。C25系列產(chǎn)品提供5VDC、10VDC或4-20mA三種輸出類型，可使用六英尺多芯電纜及卡口、DSub或M12x1接頭進(jìn)行電氣連接。
Model C25超高純壓力變送器
特性
泄露率低
VCR接頭
C25系列壓力變送器采用Setra的可變電容技術(shù)，配有VIM/VAR316L不銹鋼隔膜和絕緣電極板。絕緣電極板與傳感器本地構(gòu)成可變電容，當(dāng)氣體壓力升高時，隔膜會變得略圓，使電容減小，傳感器檢測到電容變化，并將其轉(zhuǎn)換為高精度的線性直流電信號。幾乎不受EMI/RFI干擾。
在制造和裝配完成后，Setra超高純壓力變送器還要接受去離子水沖洗、高純氮?dú)獯祾?、烘干、雙層包裝、氮?dú)獬渥⒑兔芊獾忍幚?，最后才發(fā)貨。
注:Setra的質(zhì)量標(biāo)準(zhǔn)是根據(jù)ANSl-Z540制定的。該產(chǎn)品的
標(biāo)定具有NIST可追蹤性，。
Vacuum Coupling Radius，金屬面密封，以下簡稱 VCR。
易于吹掃的小腔室
200PSI/250PSI/3000PSI
316LVIM/VAR不銹鋼
表面拋光度7Ra
1X10°ATM.CC/sec級別的氦滲漏實(shí)驗(yàn)
堅(jiān)固耐用，
4-20mA輸出型獲得不易燃認(rèn)證，適用于潛在危險區(qū)域
·符合CE標(biāo)準(zhǔn)要求
應(yīng)用
高純度氣體輸送系統(tǒng)
半導(dǎo)體過程工具
·氣柜
setra西特C25高純氣體壓力變送器半導(dǎo)體用
C25G050PGC41106 C25G050PGC411B1,
C25G050PGC411D1 C25G050PGC411M4
C25G050PGC42B06,C25G050PGC42BB1,
C25G050PGC42B1D1 C25G050PGC42BM4
C25G050PGC42C06, C25G050PGC42CB1,
C25G050PGC42C1D1,C25G050PGC42CM4
C25G050PGD41106 C25G050PGD411B1,
C25G050PGD411D1 C25G050PGD411M4
C25G050PGD42B06,C25G050PGD42BB1,
C25G050PGD42B1D1 C25G050PGD42BM4
C25G050PGD42C06, C25G050PGD42CB1,
C25G050PGD42C1D1,C25G050PGD42CM4
C25G100PGC41106 C25G100PGC411B1,
C25G100PGC411D1 C25G100PGC411M4
C25G100PGC42B06,C25G100PGC42BB1,
C25G100PGC42B1D1 C25G100PGC42BM4
C25G100PGC42C06, C25G100PGC42CB1,
C25G100PGC42C1D1,C25G100PGC42CM4
C25G100PGD41106 C25G100PGD411B1,
C25G100PGD411D1 C25G100PGD411M4
C25G100PGD42B06,C25G100PGD42BB1,
C25G100PGD42B1D1 C25G100PGD42BM4
C25G100PGD42C06, C25G100PGD42CB1,
C25G100PGD42C1D1,C25G100PGD42CM4
C25G250PGC41106 C25G250PGC411B1,
C25G250PGC411D1 C25G250PGC411M4
C25G250PGC42B06,C25G250PGC42BB1,
C25G250PGC42B1D1 C25G250PGC42BM4
C25G250PGC42C06, C25G250PGC42CB1,
C25G250PGC42C1D1,C25G250PGC42CM4
C25G250PGD41106 C25G250PGD411B1,
C25G250PGD411D1 C25G250PGD411M4
C25G250PGD42B06,C25G250PGD42BB1,
C25G250PGD42B1D1 C25G250PGD42BM4
C25G250PGD42C06, C25G250PGD42CB1,
C25G250PGD42C1D1,C25G250PGD42CM4
C25G30CPGPGC41106 C25G30CPGPGC411B1,
C25G30CPGPGC411D1 C25G30CPGPGC411M4
C25G30CPGPGC42B06,C25G30CPGPGC42BB1,
C25G30CPGPGC42B1D1 C25G30CPGPGC42BM4
C25G30CPGPGC42C06, C25G30CPGPGC42CB1,
C25G30CPGPGC42C1D1,C25G30CPGPGC42CM4
C25G30CPGPGD41106 C25G30CPGPGD411B1,
C25G30CPGPGD411D1 C25G30CPGPGD411M4
C25G30CPGPGD42B06,C25G30CPGPGD42BB1,
C25G30CPGPGD42B1D1 C25G30CPGPGD42BM4
C25G30CPGPGD42C06, C25G30CPGPGD42CB1,
C25G30CPGPGD42C1D1,C25G30CPGPGD42CM4
C25G1R7BGC41106 C25G1R7BGC411B1,
C25G1R7BGC411D1 C25G1R7BGC411M4
C25G1R7BGC42B06,C25G1R7BGC42BB1,
C25G1R7BGC42B1D1 C25G1R7BGC42BM4
C25G1R7BGC42C06, C25G1R7BGC42CB1,
C25G1R7BGC42C1D1,C25G1R7BGC42CM4
C25G1R7BGD41106 C25G1R7BGD411B1,
C25G1R7BGD411D1 C25G1R7BGD411M4
C25G1R7BGD42B06,C25G1R7BGD42BB1,
C25G1R7BGD42B1D1 C25G1R7BGD42BM4
C25G1R7BGD42C06, C25G1R7BGD42CB1,
C25G1R7BGD42C1D1,C25G1R7BGD42CM4
C25G007BGC41106 C25G007BGC411B1,
C25G007BGC411D1 C25G007BGC411M4
C25G007BGC42B06,C25G007BGC42BB1,
C25G007BGC42B1D1 C25G007BGC42BM4
C25G007BGC42C06, C25G007BGC42CB1,
C25G007BGC42C1D1,C25G007BGC42CM4
C25G007BGD41106 C25G007BGD411B1,
C25G007BGD411D1 C25G007BGD411M4
C25G007BGD42B06,C25G007BGD42BB1,
C25G007BGD42B1D1 C25G007BGD42BM4
C25G007BGD42C06, C25G007BGD42CB1,
C25G007BGD42C1D1,C25G007BGD42CM4
C25G017BGC41106 C25G017BGC411B1,
C25G017BGC411D1 C25G017BGC411M4
C25G017BGC42B06,C25G017BGC42BB1,
C25G017BGC42B1D1 C25G017BGC42BM4
C25G017BGC42C06, C25G017BGC42CB1,
C25G017BGC42C1D1,C25G017BGC42CM4
C25G017BGD41106 C25G017BGD411B1,
C25G017BGD411D1 C25G017BGD411M4
C25G017BGD42B06,C25G017BGD42BB1,
C25G017BGD42B1D1 C25G017BGD42BM4
C25G017BGD42C06, C25G017BGD42CB1,
C25G017BGD42C1D1,C25G017BGD42CM4
C25G250PCC41106 C25G250PCC411B1,
C25G250PCC411D1 C25G250PCC411M4
C25G250PCC42B06,C25G250PCC42BB1,
C25G250PCC42B1D1 C25G250PCC42BM4
C25G250PCC42C06, C25G250PCC42CB1,
C25G250PCC42C1D1,C25G250PCC42CM4
C25G250PCD41106 C25G250PCD411B1,
C25G250PCD411D1 C25G250PCD411M4
C25G250PCD42B06,C25G250PCD42BB1,
C25G250PCD42B1D1 C25G250PCD42BM4
C25G250PCD42C06, C25G250PCD42CB1,
C25G250PCD42C1D1,C25G250PCD42CM4
C25G30CPCC41106 C25G30CPCC411B1,
C25G30CPCC411D1 C25G30CPCC411M4
C25G30CPCC42B06,C25G30CPCC42BB1,
C25G30CPCC42B1D1 C25G30CPCC42BM4
C25G30CPCC42C06, C25G30CPCC42CB1,
C25G30CPCC42C1D1,C25G30CPCC42CM4
C25G30CPCD41106 C25G30CPCD411B1,
C25G30CPCD411D1 C25G30CPCD411M4
C25G30CPCD42B06,C25G30CPCD42BB1,
C25G30CPCD42B1D1 C25G30CPCD42BM4
C25G30CPCD42C06, C25G30CPCD42CB1,
C25G30CPCD42C1D1,C25G30CPCD42CM4
C25G202PCC41106 C25G202PCC411B1,
C25G202PCC411D1 C25G202PCC411M4
C25G202PCC42B06,C25G202PCC42BB1,
C25G202PCC42B1D1 C25G202PCC42BM4
C25G202PCC42C06, C25G202PCC42CB1,
C25G202PCC42C1D1,C25G202PCC42CM4
C25G202PCD41106 C25G202PCD411B1,
C25G202PCD411D1 C25G202PCD411M4
C25G202PCD42B06,C25G202PCD42BB1,
C25G202PCD42B1D1 C25G202PCD42BM4
C25G202PCD42C06, C25G202PCD42CB1,
C25G202PCD42C1D1,C25G202PCD42CM4
C25G205PCC41106 C25G205PCC411B1,
C25G205PCC411D1 C25G205PCC411M4
C25G205PCC42B06,C25G205PCC42BB1,
C25G205PCC42B1D1 C25G205PCC42BM4
C25G205PCC42C06, C25G205PCC42CB1,
C25G205PCC42C1D1,C25G205PCC42CM4
C25G205PCD41106 C25G205PCD411B1,
C25G205PCD411D1 C25G205PCD411M4
C25G205PCD42B06,C25G205PCD42BB1,
C25G205PCD42B1D1 C25G205PCD42BM4
C25G205PCD42C06, C25G205PCD42CB1,
C25G205PCD42C1D1,C25G205PCD42CM4
JIU
C25G007BCC41106 C25G007BCC411B1,
C25G007BCC411D1 C25G007BCC411M4
C25G007BCC42B06,C25G007BCC42BB1,
C25G007BCC42B1D1 C25G007BCC42BM4
C25G007BCC42C06, C25G007BCC42CB1,
C25G007BCC42C1D1,C25G007BCC42CM4
C25G007BCD41106 C25G007BCD411B1,
C25G007BCD411D1 C25G007BCD411M4
C25G007BCD42B06,C25G007BCD42BB1,
C25G007BCD42B1D1 C25G007BCD42BM4
C25G007BCD42C06, C25G007BCD42CB1,
C25G007BCD42C1D1,C25G007BCD42CM4
C25G017BCC41106 C25G017BCC411B1,
C25G017BCC411D1 C25G017BCC411M4
C25G017BCC42B06,C25G017BCC42BB1,
C25G017BCC42B1D1 C25G017BCC42BM4
C25G017BCC42C06, C25G017BCC42CB1,
C25G017BCC42C1D1,C25G017BCC42CM4
C25G017BCD41106 C25G017BCD411B1,
C25G017BCD411D1 C25G017BCD411M4
C25G017BCD42B06,C25G017BCD42BB1,
C25G017BCD42B1D1 C25G017BCD42BM4
C25G017BCD42C06, C25G017BCD42CB1,
C25G017BCD42C1D1,C25G017BCD42CM4
C25G050PAC41106 C25G050PAC411B1,
C25G050PAC411D1 C25G050PAC411M4
C25G050PAC42B06,C25G050PAC42BB1,
C25G050PAC42B1D1 C25G050PAC42BM4
C25G050PAC42C06, C25G050PAC42CB1,
C25G050PAC42C1D1,C25G050PAC42CM4
C25G050PAD41106 C25G050PAD411B1,
C25G050PAD411D1 C25G050PAD411M4
C25G050PAD42B06,C25G050PAD42BB1,
C25G050PAD42B1D1 C25G050PAD42BM4
C25G050PAD42C06, C25G050PAD42CB1,
C25G050PAD42C1D1,C25G050PAD42CM4
C25G100PAC41106 C25G100PAC411B1,
C25G100PAC411D1 C25G100PAC411M4
C25G100PAC42B06,C25G100PAC42BB1,
C25G100PAC42B1D1 C25G100PAC42BM4
C25G100PAC42C06, C25G100PAC42CB1,
C25G100PAC42C1D1,C25G100PAC42CM4
C25G100PAD41106 C25G100PAD411B1,
C25G100PAD411D1 C25G100PAD411M4
C25G100PAD42B06,C25G100PAD42BB1,
C25G100PAD42B1D1 C25G100PAD42BM4
C25G100PAD42C06, C25G100PAD42CB1,
C25G100PAD42C1D1,C25G100PAD42CM4
C25G250PAC41106 C25G250PAC411B1,
C25G250PAC411D1 C25G250PAC411M4
C25G250PAC42B06,C25G250PAC42BB1,
C25G250PAC42B1D1 C25G250PAC42BM4
C25G250PAC42C06, C25G250PAC42CB1,
C25G250PAC42C1D1,C25G250PAC42CM4
C25G250PAD41106 C25G250PAD411B1,
C25G250PAD411D1 C25G250PAD411M4
C25G250PAD42B06,C25G250PAD42BB1,
C25G250PAD42B1D1 C25G250PAD42BM4
C25G250PAD42C06, C25G250PAD42CB1,
C25G250PAD42C1D1,C25G250PAD42CM4
C25G30CPAC41106 C25G30CPAC411B1,
C25G30CPAC411D1 C25G30CPAC411M4
C25G30CPAC42B06,C25G30CPAC42BB1,
C25G30CPAC42B1D1 C25G30CPAC42BM4
C25G30CPAC42C06, C25G30CPAC42CB1,
C25G30CPAC42C1D1,C25G30CPAC42CM4
C25G30CPAD41106 C25G30CPAD411B1,
C25G30CPAD411D1 C25G30CPAD411M4
C25G30CPAD42B06,C25G30CPAD42BB1,
C25G30CPAD42B1D1 C25G30CPAD42BM4
C25G30CPAD42C06, C25G30CPAD42CB1,
C25G30CPAD42C1D1,C25G30CPAD42CM4
