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當前位置：上海西努光學科技有限公司>>顯微自動化>>WDI ATF>>自動對焦傳感器 ATF6 SWIFT

自動對焦傳感器 ATF6 SWIFT

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TheATF6SWIFTWDI’sATF6SWIFTisahighspeed,highaccuracy,autonomousdigitalautofocussensor

詳細介紹

The ATF6 SWIFT
WDI’s ATF6 SWIFT is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture" (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting a laser line onto the sample and digitally processing the image, the ATF6 provides extremely fast and accurate measurements of the distance and direction to focus. This information can then be output directly to WDI’s MCM+ or MCZ controller, or to any compatible controller.
High Accuracy At Fast Speeds
WDI’s ATF6 SWIFT sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens" (TTL) technique allows the ATF6 SWIFT to provide extremely accurate autofocus, with a success rate typically higher than 99%. The on-board digital processing coupled with an improved faster sampling rate allows it to maintain this accuracy with 3 times the speed of previous versions.
Static or Dynamic Autofocus
The ATF6 SWIFT is continually assessing distance and direction to focus, updating its data every 0.15 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in high speed motion.
Maximum Flexibility
By projecting a laser line, the AFT6 SWIFT sensor operates equally effectively on patterned and un-patterned specimens as well as diffusing and reflective surfaces making it ideal for media such as TFT arrays, photo masks and semiconductor wafers. The sensor also automatically adjusts its laser intensity and sensor expose time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and
wavelengths including UV, NUV and NIR. The ATF6 SWIFT can also achieve focusing with a programmable Z offset function.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. The ATF6 SWIFT can be purchased as either a stand-alone (SA) sensor with analog output, or as a full autofocus system (SYS), integrated with either WDI’s MCM+ controller for driving an external Z stage or MCZ controller which includes the ability to drive a two-phase stepper motor for Z actuation. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve. The AFT6 SWIFT is also available in specially designed configurations; one for LCD inspection/repair, another designed for the unique requirements of OLED, LTPS & IG70 panel inspection and other suited for cell and module repair.

ATF6 SWIFT AUTO FOCUS & TRACKING SYSTEM

ATF6 SWIFT Sensor
Structured Light PatternLine Segment
Sensor WavelengthChoice of 510nm, 660nm or 785nm
Image DetectorArea Scan CMOS
Internal Update Rate20kHz
Static Autofocus Accuracy± 1/4 Objective Depth of Field
Fast Tracking Autofocus Accuracy± 1/2 Objective Depth of Field

General Performance
Output Data Rate6.5kHz6.5kHz6.5kHz                                     
Reflectivity Adaption Delay1ms
Laser TypeSemiconductor
Laser SafetyClass 2 510, 660, 785nm
Weight250g
Dimensions40 X 40 X 120mm
Maximum Cable Length1.8m
ComplianceCE SEMI
External Requirements 
Specimen Reflectivity1% ~ 99%
Glass Thickness> 0.5mm
Diffusing SpecimenYes
Specular SpecimenYes
Specular SpecimenYes
Textured SpecimenYes
Operating Specifications
Input Voltage18V ~ 25V, 24V Nominal
Operating Temperature18°C ~ 35°C
Storage Temperature10°C ~ 44°C
Storage Temperature10% ~ 75% Non Condensing

 


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