MVME147-013 ,MVME147-013 

MVME147-013 ,MVME147-013 

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MVME147-013 ,MVME147-013 

2  Stec SEC-4400 MFC, SEC-4400M, WF6 gas, 10 SCCM fl

 HVA 21250-0306Z-001 Novellus 19-147081-00, 3' High

Motion Control Assembly w/ 4 advanced motion control Se

Lot of 2 Aera TC FC-PA7800C MFC 200 sccm CF4, Novellus

Lot of 2 Aera TC FC-PA7800C MFC 50 sccm N2, Novellus 22

MKS 600 series pressure controller 655AD2B

2 Horiba Stec LV-50PO LFC 1@25 ccm, and 1@ 20 ccm TEOS

air bearing Spindle Federal mogul Westwind. 1073-69

Electroglas 012031-002 PCB, memory system

Lot of 20 Opto 22 DA4T Digital analog converter module

HAMAT-4 4 channel Ozone monitor gas box, IN USA inc.

AMAT 0021-39792  Perf Plate, Shower Head, OX, 200mm,

2  Hitachi 2-821453-01 Electrode Covers

Bronkhorst MFC N2 20 SLM Press CTL (Bronkhorst)

 Vat Series 61236-PAGG-0003?/0006 Butterfly valve con

7 MKS baratron 225A-25603, 2.5 Inch H2O Range, S05601

Spellman High Voltage Electronics X2784, Model ESC1.5PN

 PCB RS232 Eight Port with cables

ALCA DML-3X50 694-7600-001, DL MULDEM SHELF

AMAT 0021-36470 Faceplate Chamber, TEOS, Product X, Per

ASML 130-127 PCB Artic

lot of 2 Tylan general MDVX-100B motor driven throttle

Ferrofluidic feedthrough FTH-0009-A 508332-000

TWO Aera MFC FC-7820C, N2 100 SLM

NOVELLUS 27-156710-00 CONTROLLER I/O DUALCAP VERS. 4.8

ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A

PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72

ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00

SIOC wts-vh sioc 1 NOVELLUS 02-123968-00 REV. 2

 AMAT 0240-19130 Kit, Cleancup, REFLEXION

SEREN I1600 ICP Generator

AMAT 0041-05383 200mm Zone 5 Profiler Peek

vacuum chamber Flange, Cryo Turbo, Gate valve interface

ICS advent Data Acquisition computer 8535-TC-03,19-1?379

Opto 22 DA4T 1 box of 23  digital-analog converter m

2 AMAT 0010-40099 Erhorn RF match network price for bot

Two AMAT 0020-37210 Loadlock Casset Holder

Novellus / Porter TDEAT Flow control assembly 020495640

ENI Polara-260 Bipolar Pulsed Supply 0190-01428

2 Stec MFC SEC-4400MC, N2 200 SCCM, with calibration sh

2 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sh

5 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira

ISIOC RF HCM PVD-PVD RACK NOVELLUS 02-124572-00 REV. 1

ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1

ISIOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV.A

SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A

Lot of 2 Novellus 02-140949-00 REV C, Main system start

Lot of 2 MDC LAV-250-PAA 1MC, Vacuum Isolation valves,

AMAT 0200-10814 125 mm Pedestal

AMAT 0010-30091 HV MODULE ESC, 5200 Centura Module assy

Novellus 60-112545-00, Toggle Valve, Manf, HDP 300

5 STEC MFC SEC-4400M C3F6, WF6, SiH4,

3 Takex Wide Sensors SS20-TR40, Input 12-24V DC, 150mA.

VME MOTOROLA 2304-900

LAM 853-015130-103 RF Match,

3 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min

4 Unit 8560 series UFC-8561C H2 HCL, AMAT 3030-12306

Kensington lab, 77-4000-0108-00 Robot axis multilink Z,

CANON Litho tool BG3-2526-000 EX4 ND filter, 101-061208

Novellus A01-132-01 Water cooled chamber, Gasonic A01-1

ASTeX D13604 Wave Guide with 2.5 Ghz Coupling, AMAT HDP

AMAT 0240-70903 Centura 9298 basic indexter, Non ENP, L

5 1381-658459-12 connector PCB, 648180

AMAT 0150-1000 Kaiser systems inc power supply S1-1-100

Novellus 01-17005-00 Controller MPU 9100

AMAT 0100-38027 Seriplex I/O distribution board

AMAT 0190-20048 Synergy v21 PCB Board

MVME147-013 ,MVME147-013