HIMA F3236

  2.3 控制系統(tǒng)從結(jié)構(gòu)上要充分地采用了冗余技術(shù)。對(duì)于控制系統(tǒng)的控制器、網(wǎng)絡(luò)通訊等必須冗余，且各冗余設(shè)備之間必須能實(shí)現(xiàn)無擾切換.采用冗余結(jié)構(gòu)不僅能避免控制系統(tǒng)的局部故障擴(kuò)大事故，保證機(jī)組安全穩(wěn)定運(yùn)行，同時(shí)也保證設(shè)備故障的在線排除，從而消除事故隱患。
    2.4 控制系統(tǒng)軟件的可維護(hù)性要好。尤其是以下幾個(gè)方面：程序及軟件的穩(wěn)定性好，不會(huì)出現(xiàn)系統(tǒng)或單個(gè)控制器死機(jī)等問題；系統(tǒng)自診斷性好：控制器及IO信號(hào)有出錯(cuò)報(bào)警；人機(jī)交換友好：可以在線修改程序及下裝；備品備件有可靠保證：在15年內(nèi)采購(gòu)容易且周期短，價(jià)格低;功能是否*?？刂葡到y(tǒng)的軟件的可讀性好,其組態(tài)功能塊的種類是否能輕易實(shí)現(xiàn)DCS控制系統(tǒng)的各種工藝功能的需要。

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Tylan FC-2900V Mass Flow Controller 1 SLM SF6 Used

SAM SFC480C Mass Flow Controller MO-4V4C2 20 SCCM He Used

Tylan FC-2900V Mass Flow Controller 1 SLM He Used

Tylan FC-2900V Mass Flow Controller 10 SLM O2 Used

Tylan FM-360V Mass Flow Meter 1000 SCCM N2 Used

Tylan FC-2900V Mass Flow Controller 1 SLM N2 Used

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter AMAT 3030-11063 Used

Celerity 3030-13510 Mass Flow Controller 150 SCCM Ar Used

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter AMAT 3030-11066 Used Working

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter 1.5g/min AMAT 3030-11074 Used

Tylan FC-2979MEP5 Mass Flow Controller 5 SCCM O2 Used

Millipore FC-2979MEP5 Mass Flow Controller 20 SCCM C5F8 Used

Tylan FC-2979MEP5 Mass Flow Controller 100 SCCM CF4 Used

Tylan FC-2979MEP5 Mass Flow Controller 200 SCCM SF6 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 200 CCM CF4(0.419) Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 30 SCCM O2 Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 100 CCM CHF3(0.498) Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 500 CCM 4%CH4/Ar Used

Aera FC-D985CT-BH Mass Flow Controller FC-D985C 500 SCCM Ar Used

Aera FC-D980C Mass Flow Controller Multi-4 N2 Equivalent CA-98D9-Z Used

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter Used Working

STEC SEC-4600M Mass Flow Controller AMAT 3030-09676 100 SLM N2 Used

Horiba STEC LF-210A-EVD Liquid Mass Flow Meter AMAT 3030-10059 Used Working

Horiba STEC LF-210A-EVD Liquid Mass Flow Meter AMAT 3030-14336 Used Working

STEC SEC-A21DM Mass Flow Controller AMAT 3030-00781 Used

Horiba STEC LF-410A-EVD Liquid Mass Flow Meter AMAT 3030-06043 Used Working

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter AMAT 3030-11068 Used Working

Horiba STEC LF-410A-EVD Liquid Mass Flow Meter 3g/min TEOS Used Working

STEC LF-310A-EVD Liquid Mass Flow Meter AMAT 3030-05744 Used Working

Horiba STEC LF-410A-EVD Liquid Mass Flow Meter 1.5g/min TEOS Used Working

STEC LF-310A-EVD Liquid Mass Flow Meter AMAT 3030-08004 Used

MKS Instruments M10MB52CR3BV Mass Flow Meter 500 SCCM N2 Used

Horiba STEC SEC-Z512MG Mass Flow Controller AMAT 3030-14801 Used Working

Horiba STEC SEC-Z512MG Mass Flow Controller AMAT 3030-14638 Used Working

MKS Instruments 1179AX23CR1BV Mass Flow Controller 2000 SCCM N2 Used

MKS Instruments 1179A11CR1BV--S Mass Flow Controller 10 SCCM He Used

MKS Instruments 1640A-14387---S Mass Flow Controller AMAT 3030-06885 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26222 Used Working

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11436 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11486 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11414 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11427 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11487 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11509 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11377 Used

Celerity UFC-8565C Mass Flow Controller AMAT 0190-16329 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-16345 MultiFlo SC24 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-16343 MultiFlo SC22 Used

Celerity IFC-125C Mass Flow Controller AMAT 0010-42304 MultiFlo SC23 Used

Celerity IFC-125C Mass Flow Controller MultiFlo SC25 2.6L Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-16344 MultiFlo SC23 Used

Celerity IFC-125C Mass Flow Controller AMAT 0010-30921 MultiFlo SC21 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19313 MultiFlo SC21 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19321 MultiFlo SC28 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19316 MultiFlo SC23 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19318 MultiFlo SC25 Used

Tylan FC-280A Mass Flow Controller 200 SCCM SF6 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19315 MultiFlo SC22 Used

Unit Instruments UFC-3165 Mass Flow Controller AMAT 0190-08914 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-16346 MultiFlo SC25 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-19317 MultiFlo SC24 Used

Celerity UFC-8565 Mass Flow Controller 300 SCCM He Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11525 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11461 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11743 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11484 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11744 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11425 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11437 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11431 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11443 Used

Celerity UFC-8565 Mass Flow Controller AMAT 0190-15876 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11419 Used

Celerity UFC-8565C Mass Flow Controller AMAT 3030-12224 Used

Celerity UFC-8565C Mass Flow Controller AMAT 3030-12238 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11265 Used

Celerity UFC-8565 Mass Flow Controller AMAT 0190-13618 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12729 Used

Celerity UFC-8564 Mass Flow Controller AMAT 3030-13328 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-14179 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12341 Used

Celerity UFC-8565 Mass Flow Controller AMAT 0190-12579 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12056 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12148 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12992 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-12715 Used

Celerity UFC-8565 Mass Flow Controller AMAT 0190-15024 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11662 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11626 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11625 Used

Celerity UFC-8565 Mass Flow Controller MultiFlo SC18 N2 Equivalent Used

Unit Instruments UFC-8565 Mass Flow Controller 1 SLM SiH4 Used

Unit Instruments UFC-8565 Mass Flow Controller 200 SCCM CF4 Used

Celerity UFC-8565C Mass Flow Controller AMAT 3030-13340 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11448 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11618 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-12184 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-12183 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11386 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11268 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11590 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11374 Used

Celerity UFC-8565C Mass Flow Controller AMAT 0190-16330 Used

Unit Instruments UFC-8561C Mass Flow Controller AMAT 3030-11701 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-09942 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-01158 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-09941 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03618 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03621 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03294 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03617 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10998 Used

Unit Instruments UFC-8164 Mass Flow Controller AMAT 3030-09509 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12076 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02989 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 0190-11183 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00501 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02991 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00580 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00960 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00057 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11039 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12073 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11003 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11967 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11261 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11571 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-12086 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-10735 Used

Unit Instruments UFC-8164 Mass Flow Controller AMAT 3030-11005 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11006 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02678 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-03045 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02686 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02994 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-08923 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 0190-08919 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02684 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 0190-08925 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-09507 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 0190-08930 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10999 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10997 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-14632 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26213 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26207 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-25547 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24828 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-14610 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-14655 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-15928 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-13784 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-25652 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24825 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26208 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24836 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26292 Used

Unit Instruments UFC-1660 Mass Flow Controller 1 SLM H2 Used

Unit Instruments UFC-1660 Mass Flow Controller 20 SLM Ar Used

Celerity UFM-1660 Mass Flow Meter AMAT 3030-07103 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-12078 Used

Unit Instruments UFC-8164 Mass Flow Controller AMAT 3030-12087 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-12070 Used

Unit Instruments UFC-3165 Mass Flow Controller AMAT 3030-03184 Used

Unit Instruments UFC-1665 Mass Flow Controller AMAT 3030-06920 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24835 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-11002 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24822 Used

Celerity UFC-8165 Mass Flow Controller AMAT 3030-14777 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-28190 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26356 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26357 Used

Unit Instruments UFC-8100 Mass Flow Controller AMAT 3030-07107 Used

Aera FC-780CS Mass Flow Controller AMAT 3030-06257 Used

Celerity AAPGD4001 Mass Flow Controller 173-438 SCCM N2 Equivalent Used

Celerity AAMGD40W1 Mass Flow Controller 35-88 SCCM N2 Equivalent Used

Celerity AATGDD0W1 Mass Flow Controller 2189-4376 SCCM N2 Equivalent Used

Celerity UFC-8161 Mass Flow Controller AMAT 3030-03886 Used

Celerity UFC-8161 Mass Flow Controller AMAT 3030-12121 Used

Celerity UFC-8161 Mass Flow Controller AMAT 3030-10298 Used

Celerity UFC-8565 Mass Flow Controller AMAT 0190-15025 Used Working

Unit Instruments UFC-8165 Mass Flow Controller AMAT 0190-08929 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-26291 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11266 Used

Unit Instruments UFC-8561C Mass Flow Controller AMAT 3030-11681 Used

Celerity UFC-8161C Mass Flow Controller AMAT 3030-12413 Used

Unit Instruments UFC-8561 Mass Flow Controller AMAT 3030-10804 Used

Celerity UFC-8165C Mass Flow Controller AMAT 3030-03283 Used

Unit Instruments UFC-8565 Mass Flow Controller AMAT 3030-11502 Used

Celerity UFC-8565 Mass Flow Controller AMAT 3030-11385 Used

Celerity UFC-8565C Mass Flow Controller AMAT 0190-16332 Used

Celerity 3030-12123 Mass Flow Controller InliFlow II 20 SCCM Ar Used