HIMA F6217

 3.1 施工中要注意盤柜與地的可靠絕緣和盤柜母線的可靠接地，同時(shí)對(duì)孔洞等必須做防火處理，盤柜等要有防振動(dòng)措施。
    3.2 敷設(shè)電纜時(shí)尤其要注意強(qiáng)電弱電分開，屏蔽線的可靠接地和抗干擾。在布線過(guò)程中一定要按照設(shè)計(jì)圖紙（一定已交專人認(rèn)真審核），照?qǐng)D施工，在接線中，電纜及芯線標(biāo)記要清晰完整，能*保持；壓接端子必須用預(yù)絕緣管裝端頭處理。
    3.3 要嚴(yán)格控制電子設(shè)備間的環(huán)境條件，注意搞好消防、空調(diào)、通風(fēng)及照明等工作。尤其要提的是通風(fēng)和空調(diào)，由于DCS控制系統(tǒng)度溫度要求嚴(yán)格，所以應(yīng)盡早將空調(diào)系統(tǒng)投入運(yùn)行，*空調(diào)時(shí)出風(fēng)口的不能正對(duì)機(jī)柜或DCS其他電子設(shè)備，以免冷凝水滲透到設(shè)備內(nèi)造成危害；同時(shí)，電子卡件決不允許有粉塵進(jìn)行，所以，要求電子間能一直保持環(huán)境清潔和濾網(wǎng)干凈，注意除濕和調(diào)整好溫度。

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Tylan FC-2951MOEP5 Mass Flow Controller AMAT 3030-04762 5 SLPM O2 As-Is

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0227-39109 200 SCCM N2 As-Is

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04137 10 SCCM O2 As-Is

Tylan FC-2900MEP-5 Mass Flow Controller AMAT 3030-05787 10 SCCM O2 As-Is

Tylan FC-2951MEP5 Mass Flow Controller AMAT 0227-46755 200 SCCM SiH4 As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0225-98617 50 SCCM C2H2F4 As-Is

Tylan FC-2900MEP5-4V Mass Flow Controller AMAT 3030-05787 10 SCCM O2 As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0225-98622 50 SCCM O2 As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0225-98616 50 SCCM N2 As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0227-01643 50 SCCM SF6 As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0225-98620 50 SCCM CH3F As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 3030-06428 5 SLPM Ar As-Is

Tylan FC-2900MEP Mass Flow Controller AMAT 0225-98245 30 SCCM C4F8 As-Is

Tylan FC-2951MEP5 Mass Flow Controller AMAT 0225-16003 500 SCCM SiH4 As-Is

Tylan FC-2902MEP Mass Flow Controller 1 SLPM O2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 3030-05897 100 SCCM N2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 0227-38164 200 SCCM CL2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 0227-12854 200 SCCM CL2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 0227-44674 500 SCCM N2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller LAM 797-093267-405 100 SCCM CL2 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 0227-44673 1 SLPM N2 As-Is

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0225-08018 3 SLPM N2 Used

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0227-44313 1 SLPM N2 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-00299 100 SCCM BCL3 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04726 200 SCCM Ar As-Is

Millipore FC-2900M Mass Flow Controller AMAT 3030-05429 5 SLPM N2 Used

Millipore FC-2900M Mass Flow Controller 200 SCCM SF6 As-Is

Millipore FC-2900M Mass Flow Controller AMAT 3030-05412 100 SCCM N2 As-Is

Millipore FC-2900MEP5 Mass Flow Controller 500 SCCM SF6 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04845 500 SCCM O2 As-Is

Millipore FC-2900MEP Mass Flow Controller AMAT 3030-04858 100 SCCM NF3 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-02734 100 SCCM CF4 As-Is

Mykrolis FC-2902MEP5-T Mass Flow Controller AMAT 3030-04198 500 SCCM NH3 As-Is

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04126 100 SCCM C2F6 As-Is

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04106 100 SCCM BCL3 As-Is

Millipore FC-2900M-4V Mass Flow Controller AMAT 0227-05358 100 SCCM CO As-Is

Millipore FC-2900MEP-4V Mass Flow Controller AMAT 0225-98618 100 SCCM CHF3 As-Is

Millipore FC-2900MEP-4V Mass Flow Controller 3030-09605 200 SCCM 70%He/30%O2

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0227-43444 100 SCCM N2 As-Is

Millipore FC-2900MEP5-4V Mass Flow Controller AMAT 3030-04327 20 SCCM CF4 As-Is

Tylan FC-2952MEP5-T Mass Flow Controller 200 SCCM CL2 As-Is

Tylan FC-2902MEP-T-4V Mass Flow Controller 100 SCCM CO As-Is

Tylan FC-2900MEP5 Mass Flow Controller 3030-04984 200 SCCM CL2 Used

Tylan FC-2900MEP5 Mass Flow Controller 3030-04986 200 SCCM HBR Used

Tylan FC-2952MEP5-T Mass Flow Controller 50 SCCM N2 As-Is

Tylan FC-2900MEP5 Mass Flow Controller 0227-42602 50 SCCM 30%O2/70%He Used

Tylan FC-2900MEP Mass Flow Controller AMAT 3030-02224 20 SCCM N2 As-Is

Tylan FC-2902MEP5 Mass Flow Controller 500 SCCM Ar As-Is

Tylan FC-2900MEP Mass Flow Controller 20 SCCM O2 As-Is

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04128 100 SCCM SF6 As-Is

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04127 200 SCCM SF6 Used

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-09372 50 SCCM 30%O2/70%He

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04986 200 SCCM HBR As-Is

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04152 200 SCCM CL2 As-Is

Mykrolis DSPAE100 Digital Mass Flow Controller InliFlow II 100 SCCM CHF3

Mykrolis DSWAE100 Digital Mass Flow Controller 11000-30000 SCCM N2 Used

Millipore FC-2902MEP-T Mass Flow Controller 1 SLPM Ar As-Is

Millipore FC-2902MEP-T Mass Flow Controller 1 SLPM N2 As-Is

Millipore FC-2902MEP-T Mass Flow Controller 1 SLPM He As-Is

Millipore FC-2902MEP-T Mass Flow Controller 500 SCCM He As-Is

Celerity DSSAD10W Digital Mass Flow Controller IN2 2000 SCCM N2 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04346 200 SCCM N2 As-Is

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04984 200 SCCM CL2 As-Is

Mykrolis FC-2902MEP5-T Mass Flow Controller AMAT 3030-04191 10 SLPM N2 As-Is

Millipore FSFGE100D405 Digital Flow Controller 5000 SCCM N2 As-Is

Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-05695 200 SCCM He As-Is

Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04136 20 SCCM O2 As-Is

Tylan FC-2952MEP5 Mass Flow Controller AMAT 3030-04729 200 SCCM SF6 As-Is

Tylan FC-2950MEP5 Mass Flow Controller AMAT 3030-04729 200 SCCM SF6 As-Is

Tylan FC2900MEP5 Mass Flow Controller AMAT 3030-04729 200 SCCM SF6 As-Is

Tylan FC-2900M Mass Flow Controller AMAT 0226-42482 1500 SCCM He As-Is

Tylan FC-2900MEP-L Mass Flow Controller AMAT 0227-06166 10 SCCM O2 As-Is

Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-04729 100 SCCM SF6 As-Is

Unit Instruments UFC-8561 Mass Flow Controller 30L He As-Is

Unit Instruments UFC-8561 Mass Flow Controller 5L NF3 As-Is

Unit Instruments UFC-8561 Mass Flow Controller 3 SLM N2 As-Is

Millipore FC-2902MEP5-T Mass Flow Controller AMAT 3030-00559 5 SLPM N2 As-Is

Millipore FC-2902MEP5-T Mass Flow Controller 1 SLPM H2 As-Is

Millipore FSDGE100GC05 Digital Flow Controller 400 SCCM NH3 Used

Mykrolis AAKGD40W1 Digital Mass Flow Controller AMAT 0190-19973 18 SCCM N2 Used

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-00298 1 SLPM N2 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-28960 MultiFlo SC23 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-28860-01 MultiFlow SC25 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-26051 MultiFlo SC27 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-26050 MultiFlo SC26 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12079 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10990 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-28963 MultiFlo SC26 Used

Millipore FC-2952MEP5 Mass Flow Controller AMAT 3030-09381 100 SCCM SiF4 Used

Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04123 100 SCCM C4F8 Used

Millipore FC-2900M Mass Flow Controller AMAT 0225-05386 200 SCCM BCL3 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-26052 Multiflo SC28 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-28856 MultiFlo SC21 Used

Mykrolis FC-2902MEP5-T Mass Flow Controller AMAT 3030-04246 300 SCCM SiH4 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10989 Used

Celerity UFC-8165 Mass Flow Controller AMAT 0190-24840 3L NF3 Used

Celerity IFC-125C Mass Flow Controller AMAT 0190-28958 MultiFlo SC21 Used

Millipore FC-2902MEP-T-4V Mass Flow Controller 200 SCCM CL2 Used

Millipore FC-2900MEP5-4V Mass Flow Controller AMAT 0227-01643 50 SCCM SF6 Used

Unit Instruments UFC-8561 Mass Flow Controller 20L Ar Used

Millipore FC-2902MEP5-T Mass Flow Controller AMAT 0227-64277 500 SCCM Ar Used

Mykrolis FC-2979MEP5-L Mass Flow Controller 100 SCCM N2 Used

Unit Instruments UFC-8561 Mass Flow Controller 30L N2 Used

Millipore FSFGE100GE0S Digital Flow Controller 3 SLPM NF3 Used

STEC SEC-4500M Mass Flow Controller AMAT 3030-05704 20 SLM N2 Used

STEC SEC-4500M Mass Flow Controller 20 SLM NH3 Used

STEC SEC-4500M Mass Flow Controller AMAT 3030-02330 10 SLM O2 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00519 30L N2 Used

Unit Instruments UFC-3165 Mass Flow Controller AMAT 3030-03331 Used

Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-02944 10L N2 Used

MKS Instruments 649A21T11CAVR-S Pressure Controller 10 SCCM He Used

Mykrolis DSRGD100 Mass Flow Controller InliFlow II 1000 SCCM Ar Used

Mykrolis FC-2952MEP5-T Mass Flow Controller 01-17740 10 SLPM N2 Used

Mykrolis FC-2952MEP5-T-4?V Mass Flow Controller AMAT 3030-04191 10 SLPM N2 Used

Millipore FC-2900MEP Mass Flow Controller AMAT 0224-44143 1500 SCCM C2F6 Used

MKS Instruments 179A51CR3BM---S Mass-Flo Meter 50 SCCM He Used

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04726 200 SCCM Ar Used

Celerity AAPGD40W1 Mass Flow Controller IN3XP 173-438 SCCM N2 Equivalent Used

Tylan FC2900MEP 4V Mass Flow Controller AMAT 3030-04984 200 SCCM Cl2 Used

Celerity AARGD4001 Mass Flow Controller 858 SCCM N2 Used

Celerity AANGD40W1 Mass Flow Controller AMAT 0190-19976 172 SCCM N2 Used

Celerity AASGD40W1 Mass Flow Controller AMAT 0190-19979 859-2188 SCCM N2 Used

Tylan FC-2900MEP5 Mass Flow Controller 0226-43231 50 SCCM CHF3 Used

Millipore InliFlow Digital Mass Flow Controller FACAF100R10V working

Horiba STEC Liquid Mass Flow Meter LF-A30M-A-EVD Working TEPO

Horiba STEC Liquid Mass Flow Meter LF-F40M-A-EVD Working TMOS

Horiba STEC LF-210A-EVD Liquid Mass Flow Meter Used Working

Millipore InliFlow Digital Mass Flow Controller FSCAD100CG00 working

Horiba STEC LF-A40M-A-EVD Liquid Mass Flow Meter 2.0g/min AMAT 3030-11074 Used

Horiba STEC LF-310A-EVD Liquid Mass Flow Meter TEB .5g/min Working

Horiba STEC LF-F40M-A-EVD Liquid Mass Flow Meter 1.0 g/min H2O Working

Millipore FSFAE100D406 Mass Flow Controller InliFlow 5000 SCCM N2 Used

Horiba STEC MFC NF3 100 SCCM 9 Pin DSub 1/4 VCR SEC-4401M Untested AS-IS

Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04731 As-Is

Celerity 9240-03580 Mass Flow Controller Argon Bleed Assembly working

STEC SEC-4550 4550M MFC Mass Flow Controller N2O 20LM untested

Mykrolis InliFlow MFC FSEGD100AM00 N2 1000 SCCM

Mykrolis FSEGD100B700 Mass Flow Controller 1000 SCCM Ar Used

STEC SEC-4600MO-SUC N2 100LM MFC Mass Flow Controller working

STEC SEC-7440MO Mass Flow Controller 1 SLM SiH4 Used Working

STEC SEC-7440MO Mass Flow Controller 1 SLM SiH2Cl2 Used Working

STEC SEC-7440MO Mass Flow Controller 300 SCCM H2 Used Working

STEC SEC-7440MO Mass Flow Controller 10 SLM H2 Used Working

STEC SEC-7440MO Mass Flow Controller 1.5 SLM Ar Used Working

Millipore InliFlow Digital Flow Controllers Mykrolis Lot of 5 As-Is

Celerity 9240-05462ITL Mass Flow Controller Argon Bleed Assembly Used

STEC SV-P1203 Mass Flow Controller SV-P1000 Lot of 5 Used

MILLIPORE MFC Surface Mounts FC-2979MEP5-WM CHF3 AS-IS

STEC Liquid Mass Flow Meter TiCl4 LF-210A-EVD NEW

Brooks Instrument GF125C-901090 Mass Flow Controller AMAT 0190-32367 Used

Aera FC-D980C Mass Flow Controller 300 SCCM He Used Working

Aera FCPI981CBAXDIDJ?AA Mass Flow Controller 3000 SCCM Multi-07 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15618 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15818 Used Working

MKS Instruments 640A-23510 Pressure Controller Type 640 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15619 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15633 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-16280 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15621 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15614 Used Working

Horiba STEC SEC-Z512MGX Mass Flow Controller AMAT 3030-15615 Used Working

Unit Instruments UFC-1660 Mass Flow Controller AMAT 3030-08694 Used Working

Aera FCPIDN980C-ABA Mass Flow Controller 100 SCCM Multi-04 Used

Celerity UFC-300 Mass Flow Controller Multiflo SC24 N2 Equivalent Used

Celerity UFC-300 Mass Flow Controller Multiflo SC23 N2 Equivalent Used

Millipore FSEGD100XJ00 Mass Flow Controller 100 SCCM C4F6 Used

Millipore FSDGD100L500 Mass Flow Controller 100 SCCM SF6 Used

Millipore FSDGD100BR00 Mass Flow Controller 100 SCCM C4F8 Used

Millipore FSEGD100JW00 Mass Flow Controller 2000 SCCM O2 Used

Millipore FSDGD1000V00 Mass Flow Controller 200 SCCM CHF3 Used

Millipore FSDGD100L700 Mass Flow Controller 100 SCCM CH3F Used

Millipore FSEGD100AR00 Mass Flow Controller 2000 SCCM Ar Used

Millipore FSDGD1001805 Mass Flow Controller 500 SCCM N2 Used

Millipore FSEGD101CT00 Mass Flow Controller 500 SCCM CH4 Used

Millipore FSDGD101D100 Mass Flow Controller 70 SCCM CHF3 Used

Millipore FSCGD101R400 Mass Flow Controller 26 SCCM O2 Used

Millipore FSEGD100FG00 Mass Flow Controller 200 SCCM C4F8 Used

STEC SEC-4550M Mass Flow Controller 50 SLM H2 Used

STEC SEC-4550M Mass Flow Controller 30 SLM HCl Used

STEC SEC-4400M Mass Flow Controller 200 SCCM SiH2Cl2 Used

STEC SEC-4400M Mass Flow Controller 500 SCCM 1%GeH4/H2 Used

STEC SEC-4500M Mass Flow Controller 20 SLM H2 Used

STEC SEC-4400M Mass Flow Controller 1 SLM H2 Used

STEC SEC-4500M Mass Flow Controller 10 SLM H2 Used

STEC SEC-4500M Mass Flow Controller 10 SLM He Used

STEC SEC-4400M Mass Flow Controller 500 SCCM SiH4 Used

STEC SEC-4400M Mass Flow Controller 5 SLM H2 Used

STEC SEC-4400M Mass Flow Controller 500 SCCM HCl Used

Unit Instruments UFC-1660 Mass Flow Controller AMAT 3030-05384 Used

Unit Instruments UFC-8165 Mass Flow Controller 8165-100351 Used Working

Aera FC-7810CD Mass Flow Controller AMAT 3030-08160 Used Working

Aera FC-7810CD Mass Flow Controller 2 SLM C2F6 Used Working