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儀表網(wǎng)>產(chǎn)品庫>測量/計(jì)量>其它測量>其它測量>OTF-1200X-5-III-SF 5"滑動(dòng)法蘭1200℃三溫區(qū)CV...

OTF-1200X-5-III-SF 5"滑動(dòng)法蘭1200℃三溫區(qū)CVD系統(tǒng)

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OTF1200X-5-III-SFisaCEcertifiedsplit5"(O
OTF-1200X-5-III-SF 5"滑動(dòng)法蘭1200℃三溫區(qū)CVD系統(tǒng) 產(chǎn)品詳情

 OTF1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.

  • One 5" O.D x 1400mm L fused quartz tube and one pair of vacuum sealing flanges with pressure gauge;
  • Three 30 segments temperature controllers are installed with K type thermal couple. Microprocessor-based self-tuning PID control provides excellent control without overshootingand +/- 1 oC accuracy;
  • 800mm long sliding rail is installed with one end flange to make loading & unload sample at easy;
  • Two carts are included to support furnace and sliding rail;
  • Three flowmeters (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed in one of cart, which allow to use three types of gas during heat treatment;
  • One mechanical pump with KF25 adaptor and SS pipe are included with furnace;
  • One digital vacuum gauge is installed on the flange for easy vacuum pressure reading upto10 -4 torr;
  • Click picture below to enlarge and to see details;
111
digital vacuum gauge,SS vacuum pipe & ball valve with KF25 adaptor garantee 10-2 torr vacuum2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal.5" Quartz tube can accommodate 4" quartz wafer boat without holder.
Specifications:
Furnace structure

● Double layer steel case with two cooling fan, which ensures low surface temperature

● Energy saving high purity fibrous alumina insulation

● 內(nèi)爐膛表面涂有美國進(jìn)口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率,同時(shí)也可以延長爐膛的使用壽命

● One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge

● One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included.

Voltage & Power

● AC 208-240V Single Phase, 50/60 Hz (40A breaker required)

● Powder cord is included without plug

● 7 KW Max

Max. Temperature1200℃
Continuous Temperature1100℃
Max. Heating Rate≤20℃/min
Tube Size and Flange

● 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included

● Vacuum flanges with valves and pressure gauge are included. Click picture below to see details

Heating Zone Length

Three zones: (900mm, 36" in total)

● Zone 1: 229mm (9")

● Zone 2: 457mm (18.0")

● Zone 3: 229 mm (9")

Constant Temp. Zone

● If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within +/- 1℃

● If using one zone (center zone), constant temperature zone is 4.3" (110 mm) length within +/- 1℃

Temperature Controllers

● Three Digital Controllers, and each has 30-segement

● Built in protection from over-heated and broken thermo couple

Temperature Accuracy+/- 1℃
Heating ElementFe-Cr-Al Alloy doped by Mo
Dimension1080 X 430 x 600mm
Net Weightabout 70 kg
Warranty & Certificate

● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)

● CE Certificate

Shipping package size after crating65x45x35" ( x2)
Shipping weight540 lbs
Shipping weight

● Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment.( click picture below left to see detail specs)

● wo carts are included to allow flange sliding onthe table

● Optional: for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost ( click picture below to see details )

1                                                 1
3 Channels Float-meter gas control    3 channels MFC gas control (optional)
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