Anti-static system for ultra pure water, Super Bubbler WAC

Super Bubbler WAC is used to prevent electrostatic damage in the dicing process of semiconductor industry or the high pressure rinsing process of flat panel display industry. This system performs its function by quantitatively dissolving CO₂ gas into the inlet ultra pure water and precisely controlling the electrical resistance of outlet water. This system is more compact and weighs less than the conventional type. We have two types for purpose of usage; Rack type can be built in the wet station, and Cabinet type has a capacity of two CO₂ gas cylinders in its container. This system does not discharge exhaust CO₂ gas and waste water at all because of using direct injection system.

Specifications

• Water flow rate：200-1000?/min、200-2000?/min、300-3000?/min(N4C-1.0-120,N4C-2.0-120,N4C-3.0-120)

• Controllable range：0.11-1.9Mcm

• Control accurary Set resistivity：±0.03Mcm At constant water flow rate

• Power source：AC100-130V、AC220-240V

• Dimensions：Rack type 480*430*250mm、Cabinet type 430*430*1350mm