Deposited materials:
parylene N, C, D, F-VT4
Range of thicknesses:
0.05 to 50 micrometers
Dimensions:
width: approx. 2200 mm
depth: approx. 2700 mm
height: approx. 1600 mm
Pryolysis:
4 kW / max 850°C
Chamber:
diameter: 500 mm
length: 610 mm
Volume: approx. 120 litres
Rotary drum:
diameter: 445 mm
length: 580 mm
Volume: approx. 90 litres
Cold trap:
Liquid N2
Pump system:
dry pump system
pumping speed 1800 m3/h
Ultimate pressure:
1 x 10-3 mbar
Control:
full PC control system,
software based on Windows
Connections:
3 phases/400 V AC at 32 A/50-60 Hz
Compressed Air: 6 bars oil free and dry
Exhaust: 40 mm tube




































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