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NORDSON MARCH AP-600Plasma System

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  • 所在地上海
  • 更新時(shí)間2023-10-12
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NordsonAP-600PlasmaSystemFeatures:Touchscreencontrolandgraphicaluserinterfacegivereal-timeprocessinformationFlexibleshelfarchitectureallowsprocessingofawidevarietyofpieceparts
NORDSON MARCH AP-600Plasma System 產(chǎn)品詳情

Nordson AP-600 Plasma System Features:


Touch screen control and graphical user interface give real-time process information 

Flexible shelf architecture allows processing of a wide variety of piece parts, components or carriers 

13.56 MHz RF generator with automatic matching network delivers excellent process repeatability

Convenient facility hook-ups for periodic calibration requirements used in validation processes


Nordson AP-600 Plasma System Benefits:


State-of-the-art plasma treatment in a compact, bench-top configuration

The AP-600 system from Nordson MARCH is designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost.

The AP-600 system is completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels.

The plasma chamber is constructed of high-quality aluminum with aluminum fixtures for superior durability. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.


Plasma cleaning, surface activation and adhesion improvement 

The AP-600 system is suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. 

The AP-600 system can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. The system comes standard with two electronic mass flow controllers for optimal gas control, with another two available optionally (four total max.).



Nordson AP-600 Plasma System Specifications:


Enclosure

Dimensions

W x D x H – Footprint

569W x 869D x 704H mm

(22W x 34D x 28H in.)

Net Weight

221 kg (487 lbs)

Equipment Clearance

Right, Left, Front -569 mm (22 in.), 

Back – 254 mm (10 in.)

Chamber

Maximum Volume

50.4 liters (3076 in3)

Variable Electrode

Configurations

Power-Ground, Ground-Power, Power-Power

Number of Electrode Positions

7

Electrode Pitch

25.4 mm (1 in.)

Electrodes

Powered Working Area

330W x 330D mm (13W x 13D in.)

Ground/Perforated 

Working Area

368W x 330D mm (14.5W x 13D in.)

Floating Working Area

330W x 330D mm (13W x 13D in.)

RF Power

Standard Wattage

600 W

Frequency

13.56 MHz

Gas Control

Available Flow Volumes

10, 25, 50, 100, 250 or 500 sccm

Maximum Number of MFCs

4

Control &Interface

Software Control

PLC Control with Touch Screen Interface

Remote Interface

PlasmaLINK, ProcessLINK

Vacuum Pump

Standard Wet Pump

19.5 cfm with Oxygen Oil Mist Eliminator

Optional Wet Pump

19.5 cfm with Corrosive Oil Mist Eliminator

Optional Purged Dry Pump

22 cfm

N2 Purged Pump Flow

2 slm

Facilities

Power Supply

110 VAC, 20A, 50/60 Hz, Single Phase, 

12 AWG, 3-Wire or 220 VAC, 10A, 

50/60 Hz, Single Phase, 12 AWG, 3-Wire

Process Gas 

Fitting Size & Type

6.35 mm (0.25 in.) OD Swagelok Tube

Process Gas Purity

Lab or Electronic Grade

Process Gas Pressure

0.69 bar (10 psig) min. to 1.03 bar 

(15 psig) max., regulated

Purge Gas Fitting Size & Type

6.35 mm (0.25 in.) OD Swagelok Tube

Purge Gas Purity

Lab or Electronic Grade N2/CDA

Purge Gas Pressure

2 bar (30 psig) min. to 6.9 bar 

(100 psig) max., regulated

Pneumatic Valves 

Fitting Size & Type

6.35 mm (0.25 in.) OD Swagelok Tube

Pneumatic Gas Purity

CDA, Oil Free, Dewpoint ≤7°C(45°F),

Particulate Size<5 µm

Pneumatic Gas Pressure

3.45 bar (50 psig) min. to 6.89 bar 

(100 psig) max.,regulated

Exhaust

38 mm (1.5 in.) OD Pipe Flange

Compliance

SEMI

S2/S8 (EH&S/Ergonomics)

International

CE Marked

Ancillary

Equipment

Gas Generators

Nitrogen, Hydrogen

(Requires Additional Non-Optional Hardware)

Facilities

Chiller, Scrubber




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